Cartridge Dispense System Our new Cartridge Dispense System (CDS,P/N A21-904655) is a cost effective, low volume dispense unit. The controller will interface with the Tractrix Spin Tool and the SpinBall Single-wafer Spin System.
The CDS capabilities include:
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Dispenses most lithographic chemistries in both low and high viscosity
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Dispense Accuracy ¡À0.1ml
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175 ml capacity permits processing a full cassette of wafers without refilling
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Low hold-up volume(5.6 ml with 26 inches of dispense tubing)
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Depressurized between dispenses to prevent N2 absorption.
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Low cost
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Disposable cartridge liners eliminate crosscontamination
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Interface available for other track systems
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