 |
|
| ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
|
Equipment Description
|
|
|
Attribute |
Description |
|
Equipment Manufacturer (OEM) |
|
|
Tool Model |
S5000H |
|
Tool Description |
Scanning Electron Microscope (SEM) |
|
Date of Manufacture |
Early 1990?¡¥s |
|
Entity Code / CEID (if applicable) |
SEM02 |
|
Sample type (wafer, solid, gas, liquid) |
Wafer/Solids |
|
Sample dimensions |
4x6mm max ¡§C x-section or flat down |
|
Vendor Serial # |
6920-02 |
|
Operating System and Software Version |
Non PC based |
|
Location |
SC9-135 Electron Microscopy Lab |
|
Operational Status (fully functional, repairs needed, any cannibalization) |
Fully Operational |
|
Electrical Power Configuration (voltage, phase, current) |
208V, single phase, 35A stepped down through transformer to 100V |
|
Benchtop or standalone? |
Stand alone |
|
Sample Loading Configuration (load-lock, robot, liquid sample introduction system, etc.) |
Manual load-lock, single sample load |
Short Paragraph describing this tool, include key features, equipment options, configuration, diagrams etc.:
Ultra-high resolution scanning electron microscope (UHRSEM) ¡§C cold cathode field emission (CCFESEM)
Resolution Spec for Secondary Electron imaging (SE) ¡§C 0.6nm @ 30kev and 2.0nm @ 1keV
Immersion lens system with high performance TEM sample stage
Fully dry pumped vacuum system: Seiko Mag Lev Turbo, Ion Pums x 3, Scroll pumps x 2
Digital image capture system, also includes high resolution photo CRT with camera
|
Space and Facilities Requirements |
|
|
|
Module or Component |
Dimensions (Length x width x depth; add height, if tall tool) |
Utilities (electrical power configuration:voltage, phase, current; CDA, N2, gases, PCW, UPW, liquid nitrogen, etc.) |
|
Main Console combined with vacuum station/electron column |
80?¡À wide, 41?¡À depth Column height 70?¡À |
208V single phase, 35A stepped down to 100V CDA @ 60PSI for pneumatics N2 @ 10 PSI for purge LN2 for anti-contamination cold finger |
|
|
|
|
|
Air Cooled chiller ¡§C closed loop |
18?¡À wide, 27?¡À depth |
110V, 20A |
|
Power Rack |
24?¡À wide, 30?¡À depth 62?¡À height |
208V main power stepped down to 100V through rack and out to system |
|
PCI Image Capture Ver. 6 (PC with image capture board) |
Stand alone on computer table, 24?¡À wide, 30?¡À depth |
110V |
|
Edwards Scroll Pumps (2) |
42?¡À wide, 18?¡À depth |
Receives power from main unit |
|
System Configuration |
| |
|
|
Modules / Features / Tool Options / Chillers / Pumps |
Qty |
|
1 |
Main Unit ¡§C Console and electron column/vacuum station |
1 |
|
2 |
STEM Detector with Bright Field Aperture |
1 |
|
3 |
PCI ¡§C Digital Image Capture PC |
1 |
|
4 |
Haskris Air Cooled Chiller |
1 |
|
5 |
Various Sample holders, Bulk, X-section, x-section double tilt, STEM |
1 ea |
|
6 |
Power rack |
1 |
|
7 |
Scroll/roughing pumps |
2 |